LÅYER-one
Compact ALD system
- Precursors
- TDMATi, TMA, H₂O
- Vacuum
- Edwards iXH, 100 m³/h
- Footprint
- 2,000 × 2,575 mm
EQUIPMENT RANGE · ALD
LÅYER-one: atomic layer deposition.
Atomic precision, independent of geometry, excellent barriers and endless colours.
NOVA VacoraALD LÅYER-one enquire
Compact ALD system for TiO₂ and Al₂O₃ coatings: self-limiting deposition, layer by layer, conformal coverage even at high aspect ratios, and nanometre-scale thickness control. Ready for production on a 2 × 2.6 m footprint.
- nm
- precise coating thickness
- 2
- Coating systems: TiO₂ and Al₂O₃
- ∞
- Infinite colors
Who it is for and why
Who it is for.
Microelectronics and semiconductors, optics and photonics, energy storage and batteries, medical devices, and decorative applications requiring reproducible colours.
Why ALD LÅYER-one.
- Self-limiting layer-by-layer deposition
- Conformal coverage of complex geometries
- Dense, low-porosity coatings with chemical and thermal stability
- Barrier and dielectric properties
- Colour uniformity and material efficiency
Who it is for.
Microelectronics and semiconductors, optics and photonics, energy storage and batteries, medical devices, and decorative applications requiring reproducible colours.
Why ALD LÅYER-one.
- Self-limiting layer-by-layer deposition
- Conformal coverage of complex geometries
- Dense, low-porosity coatings with chemical and thermal stability
- Barrier and dielectric properties
- Colour uniformity and material efficiency
The system.
One cabinet, one pump, three precursors.
LÅYER-oneCompact ALD system
- Precursors
- TDMATi, TMA, H₂O
- Vacuum
- Edwards iXH, 100 m³/h
- Footprint
- 2,000 × 2,575 mm
Technical specifications
- Coatings
- TiO₂, Al₂O₃
- Precursors
- TDMATi 300 ml · TMA 300 ml · H₂O 500 ml
- Primary pump
- Edwards iXH, 100 m³/h
- Valves
- DN40 gate valve, two pneumatic DN25 angle valves
- Pressure measurement
- Baratron DN16 (process), Pirani DN16
- Cabinet W × H
- 800 × 1,810 mm, control panel at 1,474 mm
- Width including pump
- 1,590 mm
- Footprint
- 2,000 × 2,575 mm
- Connections
- Compressed air 5–6 bar, N₂ 2 bar, vacuum, cooling water, network, electricity
| Feature | LÅYER-one |
|---|---|
| Coatings | TiO₂, Al₂O₃ |
| Precursors | TDMATi 300 ml · TMA 300 ml · H₂O 500 ml |
| Primary pump | Edwards iXH, 100 m³/h |
| Valves | DN40 gate valve, two pneumatic DN25 angle valves |
| Pressure measurement | Baratron DN16 (process), Pirani DN16 |
| Cabinet W × H | 800 × 1,810 mm, control panel at 1,474 mm |
| Width including pump | 1,590 mm |
| Footprint | 2,000 × 2,575 mm |
| Connections | Compressed air 5–6 bar, N₂ 2 bar, vacuum, cooling water, network, electricity |
More product groups.
THE NEXT STEP
ALD LÅYER-one: Which configuration suits you?
Describe your parts, throughput and process. We will respond with an assessment, with sample coating and an equipment demonstration on request.